FIB Sample Preparation for In Depth EDS Analysis
نویسندگان
چکیده
منابع مشابه
TEM Sample Preparation and FIB-Induced Damage
Joachim Mayer, Lucille A. Giannuzzi, Takeo Kamino, and Joseph Michael preparation can be applied to almost any material type—hard, soft, or combinations thereof. The number of materials for which successful TEM sample preparation with FIBs has been documented certainly reaches several hundred and spans from hard matter such as metals, ceramics, and composites to soft matter including polymers, ...
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ژورنال
عنوان ژورنال: Microscopy and Microanalysis
سال: 2019
ISSN: 1431-9276,1435-8115
DOI: 10.1017/s1431927619005300